@book{23075,
	author = {Wang, Yangyuan, ed.},
	title = {Advanced Microlithography Technologies},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5645},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5645}
}