@book{23074,
	author = {Harrison, Herbert, ed.},
	title = {Advanced Microelectronic Processing Techniques},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4227},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4227}
}