00816nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003600119245008800155260003200243300002000275490003400295856010400329942000700433999001700440952016500457IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510633476 (Print)  a9781510633483 (Online)  cIIA Library  avon Freymann, Georg, ed.941641 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XIIIh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11292  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292yClick Here to Access eBook  cEB  c23036d23036  00104070aBANbBANd2011-07-01eSPIEhV. 11292l0pEB2496r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292w2021-11-05yEB