00584nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245008800148260003200236300002000268490003400288856010400322IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510633476 (Print)  a9781510633483 (Online)  cIIA Library  avon Freymann, Georg, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XIIIh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11292  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292yClick Here to Access eBook