von Freymann, Georg, ed. <br/><br/>
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII  [eBook] 

 - Washington, USA  SPIE  2020 
 - Online resource 
 - Proceedings of SPIE; V. 11292 .
<br/><br/><label>ISBN: </label>9781510633476 (Print) 9781510633483 (Online)