@book{23036,
	author = {von Freymann, Georg, ed.},
	title = {Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11292},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292}
}