00583nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245008700148260003200235300002000267490003400287856010400321IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510625020 (Print)  a9781510625037 (Online)  cIIA Library  avon Freymann, Georg, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10930  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10930yClick Here to Access eBook