von Freymann, Georg, ed. <br/><br/>
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 10930 .
<br/><br/><label>ISBN: </label>9781510625020 (Print) 9781510625037 (Online)