00582nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245008600148260003200234300002000266490003400286856010400320IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510615731 (Print)  a9781510615748 (Online)  cIIA Library  avon Freymann, Georg, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XIh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10544  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10544yClick Here to Access eBook