von Freymann, Georg, ed. <br/><br/>
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI  [eBook] 

 - Washington, USA  SPIE  2018 
 - Online resource 
 - Proceedings of SPIE; V. 10544 .
<br/><br/><label>ISBN: </label>9781510615731 (Print) 9781510615748 (Online)