TY  - BOOK
AU  - von Freymann, Georg, ed.
TI  - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
T2  - Proceedings of SPIE; V. 10115
SN  - 9781510606715 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10115
ER  -