00543nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245008800121260003200209300002000241490003300261856010300294IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628414646 (Print)  cIIA Library  avon Freymann, Georg, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics VIIIh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9374  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9374yClick Here to Access eBook