von Freymann, Georg, ed. <br/><br/>
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI  [eBook] 

 - Washington, USA  SPIE  2013 
 - Online resource 
 - Proceedings of SPIE; V. 8613 .
<br/><br/><label>ISBN: </label>9780819493828 (Print)