00541nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245008600121260003200207300002000239490003300259856010300292IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628419948 (Print)  cIIA Library  avon Freymann, Georg, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IXh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9759  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9759yClick Here to Access eBook