00541nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245008600121260003200207300002000239490003300259856010300292IN-BaIIA211028s9999 xx s 000 0 eng d a9780819484642 (Print) cIIA Library aSchoenfeld, Winston, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IVh[eBook] aWashington, USAbSPIEc2011 aOnline resource aProceedings of SPIE; V. 7927 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7927yClick Here to Access eBook