@book{23026,
	author = {Schoenfeld, Winston, ed.},
	title = {Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7591},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7591}
}