00537nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008600117260003200203300002000235490003300255856010300288IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819474513 (Print)  cIIA Library  aSuleski, Thomas, ed. 0aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IIh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7205  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7205yClick Here to Access eBook