@book{23024,
	author = {Suleski, Thomas, ed.},
	title = {Advanced Fabrication Technologies for Micro/Nano Optics and Photonics},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6883},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6883}
}