Engelmann, Sebastian, ed. <br/><br/>
Advanced Etch Technology for Nanopatterning VII  [eBook] 

 - Washington, USA  SPIE  2018 
 - Online resource 
 - Proceedings of SPIE; V. 10589 .
<br/><br/><label>ISBN: </label>9781510616707 (Print) 9781510616714 (Online)