00557nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100003000119245006000149260003200209300002000241490003400261856010400295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510607491 (Print)  a9781510607507 (Online)  cIIA Library  aEngelmann, Sebastian, ed. 0aAdvanced Etch Technology for Nanopatterning VIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10149  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10149yClick Here to Access eBook