Engelmann, Sebastian, ed. <br/><br/>
Advanced Etch Technology for Nanopatterning VI  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10149 .
<br/><br/><label>ISBN: </label>9781510607491 (Print) 9781510607507 (Online)