TY  - BOOK
AU  - Lin, Qinghuang, ed.
TI  - Advanced Etch Technology for Nanopatterning V
T2  - Proceedings of SPIE; V. 9782
SN  - 9781510600171 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9782
ER  -