@book{23020,
	author = {Lin, Qinghuang, ed.},
	title = {Advanced Etch Technology for Nanopatterning V},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9782},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9782}
}