TY  - BOOK
AU  - Wise, Rich, ed.
TI  - Advanced Etch Technology for Nanopatterning IX
T2  - Proceedings of SPIE; V. 11329
SN  - 9781510634251 (Print)
PY  - 2020///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11329
ER  -