Wise, Rich, ed. <br/><br/>
Advanced Etch Technology for Nanopatterning IX  [eBook] 

 - Washington, USA  SPIE  2020 
 - Online resource 
 - Proceedings of SPIE; V. 11329 .
<br/><br/><label>ISBN: </label>9781510634251 (Print) 9781510634268 (Online)