TY  - BOOK
AU  - Lin, Qinghuang, ed.
TI  - Advanced Etch Technology for Nanopatterning IV
T2  - Proceedings of SPIE; V. 9428
SN  - 9781628415308 (Print)
PY  - 2015///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9428
ER  -