TY  - BOOK
AU  - Oehrlein, Gottlieb, ed.
TI  - Advanced Etch Technology for Nanopatterning III
T2  - Proceedings of SPIE; V. 9054
SN  - 9780819499776 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9054
ER  -