Oehrlein, Gottlieb, ed. <br/><br/>
Advanced Etch Technology for Nanopatterning III  [eBook] 

 - Washington, USA  SPIE  2014 
 - Online resource 
 - Proceedings of SPIE; V. 9054 .
<br/><br/><label>ISBN: </label>9780819499776 (Print)