@book{23016,
	author = {Zhang, Ying, ed.},
	title = {Advanced Etch Technology for Nanopatterning II},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8685},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8685}
}