@book{23015,
	author = {Zhang, Ying, ed.},
	title = {Advanced Etch Technology for Nanopatterning},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8328},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8328}
}