00736nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003300092245005500125260003200180300002000212490003300232856010300265942000700368999001700375952016200392IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525652 (Print)  cIIA Library  aCurrent, Michael, ed.941579 0aAdvanced Applications of Ion Implantationh[eBook]  aWashington, USAbSPIEc1985  aOnline resource  aProceedings of SPIE; V. 0530  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0530yClick Here to Access eBook  cEB  c22974d22974  00104070aBANbBANd2011-07-01eSPIEhV. 530l0pEB2434r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0530w2021-11-05yEB