TY  - BOOK
AU  - Current, Michael, ed.
TI  - Advanced Applications of Ion Implantation
T2  - Proceedings of SPIE; V. 0530
SN  - 9780892525652 (Print)
PY  - 1985///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0530
ER  -