00905nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100002700119245018600146260003200332300002000364490003400384856010400418942000700522999001700529952016500546IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510623262 (Print)  a9781510623279 (Online)  cIIA Library  aPu, Mingbo, ed.941443 0a9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technologyh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10842  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10842yClick Here to Access eBook  cEB  c22832d22832  00104070aBANbBANd2011-07-01eSPIEhV. 10842l0pEB2292r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10842w2021-11-05yEB