TY  - BOOK
AU  - Pu, Mingbo, ed.
TI  - 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
T2  - Proceedings of SPIE; V. 10842
SN  - 9781510623262 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10842
ER  -