00673nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002000119245018600139260003200325300002000357490003400377856010400411IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510623262 (Print)  a9781510623279 (Online)  cIIA Library  aPu, Mingbo, ed. 0a9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technologyh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10842  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10842yClick Here to Access eBook