@book{22832,
	author = {Pu, Mingbo, ed.},
	title = {9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 10842},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10842}
}