00853nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002900092245017500121260003200296300002000328490003300348856010300381942000700484999001700491952016300508IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628419221 (Print)  cIIA Library  aQian, Shinan, ed.941430 0a8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Opticsh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9687  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9687yClick Here to Access eBook  cEB  c22818d22818  00104070aBANbBANd2011-07-01eSPIEhV. 9687l0pEB2278r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9687w2021-11-05yEB