00623nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245017500114260003200289300002000321490003300341856010300374IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628419221 (Print)  cIIA Library  aQian, Shinan, ed. 0a8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Opticsh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9687  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9687yClick Here to Access eBook