TY  - BOOK
AU  - Hearn, Gregory, ed.
TI  - 64-to 256-Megabit Reticle Generation: Technology Requirements and Approaches: A Critical Review
T2  - Proceedings of SPIE; V. 10273
SN  - 9781510610316 (Online)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10273
ER  -