@book{22794,
	author = {Hearn, Gregory, ed.},
	title = {64-to 256-Megabit Reticle Generation: Technology Requirements and Approaches: A Critical Review},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 10273},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10273}
}