TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 35th European Mask and Lithography Conference (EMLC 2019)
T2  - Proceedings of SPIE; V. 11177
SN  - 9781510628489 (Online)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11177
ER  -