Behringer, Uwe, ed. <br/><br/>
35th European Mask and Lithography Conference (EMLC 2019)  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 11177 .
<br/><br/><label>ISBN: </label>9781510628489 (Online) 9781510630673 (Print)