@book{22762,
	author = {Behringer, Uwe, ed.},
	title = {35th European Mask and Lithography Conference (EMLC 2019)},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 11177},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11177}
}