00550nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002400119245005900143260003200202300002000234490003400254856010400288IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510621213 (Print)  a9781510621220 (Online)  cIIA Library  aBehringer, Uwe, ed. 0a34th European Mask and Lithography Conferenceh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10775  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10775yClick Here to Access eBook