TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 33rd European Mask and Lithography Conference
T2  - Proceedings of SPIE; V. 10446
SN  - 9781510613560 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10446
ER  -