TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 31st European Mask and Lithography Conference
T2  - Proceedings of SPIE; V. 9661
SN  - 9781628418798 (Print)
PY  - 2015///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9661
ER  -