00509nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245005900116260003200175300002000207490003300227856010300260IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628418798 (Print)  cIIA Library  aBehringer, Uwe, ed. 0a31st European Mask and Lithography Conferenceh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9661  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9661yClick Here to Access eBook