@book{22757,
	author = {Behringer, Uwe, ed.},
	title = {31st European Mask and Lithography Conference},
	publisher = {SPIE},
	year = {2015},
	series = {Proceedings of SPIE; V. 9661},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9661}
}