@book{22733,
	author = {Behringer, Uwe, ed.},
	title = {26th European Mask and Lithography Conference},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7545},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7545}
}