TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 25th European Mask and Lithography Conference
T2  - Proceedings of SPIE; V. 7470
SN  - 9780819477705 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7470
ER  -